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INFLUENCE OF THE DEPOSITION TECHNIQUE ON THE STRUCTURAL AND OPTICAL PROPERTIES OF AMORPHOUS As40S60 FILMS

Authors: González-Leal J.M. | Stuchlík Marek | Vlček Miroslav | Márquez E.

Year: 2004

Type of publication: ostatní - přednáška nebo poster

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Language	Name	Abstract	Keywords
cze	Vliv depozičních technik na strukturní a optické vlastnosti amorfních filmů As40S60	Byl studován vliv depozičních technik na strukturní a optické vlastnosti amorfních filmů As40S60
eng	INFLUENCE OF THE DEPOSITION TECHNIQUE ON THE STRUCTURAL AND OPTICAL PROPERTIES OF AMORPHOUS As40S60 FILMS	Amorphous chalcogenide films of stoichiometric composition As40S60 have been prepared by three different deposition techniques, namely, vacuum thermal evaporation, plasma enhanced chemical vapour deposition and spin coating. Indications of film-thickness inhomogeneities were found in all samples. Thermally-evaporated and chemically-deposited samples showed wedge-shaped surface profiles, while significant surface roughness was evidenced in the spin-coated ones. Optical constants of the film samples were obtained, with accuracy better than 1 %, by using the interference method most suitable for each particular film surface profile. Structural information of the samples has been gained from X-ray experiments, and also inferred from the analysis of the dispersion of the refractive index, on the basis of a single-oscillator model. Analysis of the optical absorption spectra allowed both calculating the optical bandgaps and estimating the localised-state tail width of these semiconducting films. In addition, information about the degree of structural randomness of these amorphous film alloys was also obtained from this analysis, which is in good agreement with that derived from the X-ray diffraction results.

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