Publikace detail

Determination of the surface roughness and refractive index of amorphous As40S60 ﬁlms deposited by spin coating

Rok: 2004

Druh publikace: článek v odborném periodiku

Název zdroje: Optical Materials

Název nakladatele: Elsevier Science BV

Místo vydání: Amsterdam

Strana od-do: 147-154

Tituly:

Jazyk	Název	Abstrakt	Klíčová slova
cze	Určení drsnosti povrchu a indexu lomu amorfních filmů As40S60 připravených metodou "spin coating"	Byla studována drsnost povrchu a index lomu amorfních filmů As40S60 připravených metodou "spin coating"
eng	Determination of the surface roughness and refractive index of amorphous As40S60 ﬁlms deposited by spin coating	An envelope method, based on the optical reﬂection spectrum taken at normal incidence, has been successfully applied to the geometrical?optical characterization of thin dielectric ﬁlms having signiﬁcant surface roughness. Such a method allows the determination of the average thickness and the refractive index of the ﬁlms with accuracies better than 1%, as well as the average amplitude of the surface roughness with an accuracy of about 2%. Amorphous As40S60 thin ﬁlms have been deposited by spin coating, onto glass substrates, from a solution of the bulk material in n-propylamine. Indications of the surface roughness in these ﬁlms were found from total (specular plus diﬀuse) reﬂectance measurements using an integrating sphere, and also from mechanical measurements using a stylus proﬁler. The latter technique provided a value for the average surface roughness of 20 ? 4 nm, which is in excellent agreement with the optically determined value of 17.4? 0.4 nm.	refraction index;surface roughness;amorphous films;

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