Publikace detail

Structural and optical characterization of amorphous As40S60 and As40Se60 ﬁlms prepared by plasma-enhanced chemical vapor deposition

Autoři: González-Leal J.M. | Prieto-Alcón R. | Vlček Miroslav | Márquer E.

Rok: 2004

Druh publikace: článek v odborném periodiku

Název zdroje: Journal of Non-Crystalline Solids

Název nakladatele: Elsevier Science BV

Místo vydání: Amsterdam

Strana od-do: 88-92

Tituly:

Jazyk	Název	Abstrakt	Klíčová slova
cze	Strukturní a optická charakterizace amorfních tenkých filmů As40S60 a As40Se60 připravených metodou CVD	Byly spřipraveny a charakterizovány amorfní tenké filmy As40S60 a As40Se60 připravených metodou plasma-enhanced CVD
eng	Structural and optical characterization of amorphous As40S60 and As40Se60 ﬁlms prepared by plasma-enhanced chemical vapor deposition	Amorphous chalcogenide ﬁlms of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin ﬁlms, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-proﬁling stylus instrument, and diﬀerences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD ﬁlms, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper.	amorphous chalcogenide films;PECVD;

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